溶胶_凝胶法制备铁电薄膜的研究进展_向飞11

研究与开发

机电工程技术2011年第40卷第08

期

溶胶-凝胶法制备铁电薄膜的研究进展

向

飞

510635）

（广东省机械研究所，广东广州

。综述了溶胶-凝胶法制备铁电薄膜的原理、。最后指出，溶胶-凝胶法制备铁电薄膜工艺仍需优化和改进，；应用文献标识码：A

文章编号：1009－9492(2011)08－0096－03

1前言

具有铁电性且厚度尺寸为数十纳米到数微米的膜材料叫铁电薄膜。铁电薄膜是一类重要的功能性薄膜材料，是目前研究的前沿和热点之一。在铁电薄膜的研究中

［1-3］

（2）经过凝胶化措施，液态的溶胶转变成半刚性的固态凝胶。对于不同的体系，这个过程可以采取多种不同的方法，得到胶体凝胶或聚合凝胶。胶体凝胶系统中，凝胶化受溶胶中胶体成分之间的静电或空间作用控制，而聚合凝胶的形成决定于化学反应，包括水解、缩合和聚合反应的相对速率和速度。

（3）凝胶化之后，除去溶剂等有机物达到致密化，制备膜材料时，必须小心避免溶剂蒸发形成的大应力集中，并分解掉会引起裂纹和鼓胀的所有剩余有机物质。

（4）在适当温度下结晶。由于采用溶胶-凝胶法各组元分子级混合，而且干凝胶有很强的活性，结晶温度可能比传统的固相氧化物法所需的低几百摄氏度。结晶温度的降低，不仅可以得到具有特别相结构和新性能的独特材料，而且使陶瓷元件与半导体工艺的直接集成成为可能。

凝胶的形成有两种可能

：胶体和聚合物。可以按这两种凝胶化形式，把溶胶-凝胶法分为两大类：胶体凝胶法和聚合凝胶法。溶胶-凝胶法的基本分类如图1所示。

，

美国一直处于领先地位，美国新墨西哥州的Albuquerque 地区集中了一些研究铁电薄膜及其应用的大学、国家重点实验室（如Sandia ，Los Alamos ）和私营公司（如Radiant

Technology Incorp. ），已使该地区成为铁电薄膜的研究和开

发中心。Colorado 大学微电子研究室已成为铁电薄膜基础研究的重要基地。日本也积极开展了相关研究。目前的研究主要集中在材料的制备、表面特性的测量以及应用研究与开发

［4］

。

目前，铁电薄膜的制备方法主要有溶胶-凝胶（Sol-

Gel ）法、金属有机化学气相沉积（MOCVD ）法、脉冲激

光沉积（PLD ）法、射频磁控溅射（RF-Sputtering ）法4种。其中，溶胶-凝胶法设备简单，价格低廉，且能精确控制组分，大面积均匀成膜。由于它的热处理温度低，与半导体集成电路工艺兼容性好，容易把铁电薄膜与半导体器件集成在同一芯片上，以提高整个红外焦平面数组的可靠性并减小体积。本文介绍了溶胶-凝胶法制备铁电薄膜的原理、工艺过程、特点，综述采用此方法制备出的某些材料的铁电性能。

2原理

溶胶-凝胶法制备过程大体上包括以下几个步骤

［5］

。

（1）金属离子以醇盐或其它金属有机盐形式溶解在合适的醇溶剂中，或以金属无机盐形式溶解在水溶剂中形成溶胶。

收稿日期：2011－02－24

图1溶胶－凝胶法分类

机电工程技术2011年第40卷第08期

胶体凝胶法的凝胶一般由金属盐溶液和金属氧化物或氢氧化物溶胶得到。这种凝胶化作用是由溶胶中的胶体颗粒之间的静电或空间相互作用控制，所以又被称为“物理方法”。

根据采用的原理和机理的不同，聚合凝胶法进一步分为两大类：金属有机化合物的无机聚合凝胶法和有机聚合物玻化凝胶法。为了强调形成的聚合网络的不同，以下分别简称为无机聚合凝胶法和有机聚合凝胶法。它们的基本目的都是要制备均匀的前驱体溶液，进而得到均匀的凝胶，也即所谓的“化学方法”。

金属醇盐法是目前应用广泛的一种溶胶-凝胶方法，得到的材料性能优良，合成和烧结温度大大降低，且适合于纤维和膜的制备。但一般金属醇盐价格昂贵，且部分金属醇盐极易水解使得制备过程必须在干氮或干惰性气体等苛刻条件下进行，导致制备过程复杂化，相应地设备成本也高。正是这些问题，阻碍了金属醇盐法在陶瓷工业中的大面积推广。

有机聚合凝胶法中有大量有机物留在前驱体中，会造成膜形成的困难；另一方面，有机聚合凝胶法又有利于制备复杂组成的膜。对比金属醇盐法，有机聚合凝胶法的原料成本较低，工艺过程的环境条件较宽松，形成的前驱体溶液相对稳定。所以很有必要加强有机聚合凝胶法的研究，形成与金属醇盐法的互补。

括油脂、松香、蜡、金属、金属离子和灰尘。以硅基片为例，清洗步骤如图3所示。

对于久置的清洗过的硅片可以进行再清洗。将其置于烧杯后加入适量甲苯，超声清洗10min ，取出，再依次用丙酮和无水乙醇超声清洗10min 。氧化铝衬底的清洗和硅片一样。

图3

衬底清洗步骤

4特点

（1）化学均匀性好。由于反应是在溶液中进行，成分均匀性可达分子或原子级。在水溶液的多组分体系中，若不同金属离子在水解中共沉淀，化学均匀性可达到原子水平。对于醇溶胶体系，若金属醇盐的水解速度与缩合速度基本相当，则化学均匀性可达分子水平。

（2）化学计量准确成分配比精确可控，易于实现定量、均匀掺杂，且掺杂范围宽。

（3）制备温度低。后热处理所需温度较低，与半导体工艺兼容性好，适于制成铁电集成器件。

（4）成本低。设备简单，易于推广。

同时，溶胶-凝胶法也存在一定的局限性，主要有：

图2Sol-Gel 法制备铁电薄膜的工艺流程

（1）薄膜易出现龟裂现象；（2）工艺参数难以控制；

（3）原料较贵且容易污染环境。

3工艺过程

Sol-Gel 法制备铁电薄膜时，首先是制取一个均相溶液

系统，以保证水解反应在分子均匀水平上进行，用旋涂法或提拉法将稳定的前驱体溶液涂敷在基片上，最后将湿膜进行热处理，从而形成所需的薄膜。图2表示了Sol-Gel 法制备铁电薄膜的工艺图。

尤其要指出的是，为了用Sol-Gel 法制备出性能优良的铁电薄膜，必须综合考虑以下因素：薄膜沉积基底、薄膜沉积环境、薄膜成形过程的热演化特征和化学反应机制、退火工艺对薄膜结晶特性的影响。下面仅重点介绍基片材料的选取及清洗。

制备钙钛矿结构的铁电薄膜的基片材料主要有：Si （100）、Pt 、SrTiO 3（100或111）、MgO （100）、LaNiO 3、

5制备材料的铁电性能

表1所示为采用溶胶-凝胶法制备的氧化物薄

膜

的

铁电性能。

表1

铁电性能对比

【6-13】

ZrO 2、MgAl 2O 4、Y BaCuO 7/LaAlO3、（La ，Sr ）C oO 3/Sr-

TiO 3、R 面蓝宝石等。铁电薄膜常用的基片是硅（单晶硅）

片、MgO （单晶MgO ）基片、Al 2O 3基片等，基片与薄膜的晶体结构应相近、晶格常数相匹配，这样薄膜晶体才易于成核和生长。而且，要尽可能地清除基片表面的杂质，包

研究与开发

6结束语

机电工程技术2011年第40卷第08期

与应用研究进展［J ］. 电子元件与材料，2003，22（5）：

有关铁电薄膜及其存储器的研究取得了很大的进展，在现有工作的基础上，今后应从以下几个方面来开展更深入的工作。

（1）研究铁电薄膜的尺寸效应、印记失效、保持性能损失以及频率依赖关系(即色散关系) 。

（2）开展铁电薄膜在高频领域及微波器件的应用研究，拓展铁电薄膜的应用领域。

（3）开展无铅铁电薄膜及器件的力学性能研究工作

［14］

47-50.

［5］Charles D.E.Lakeman ，David A.Payne. Sol -Gel processing of

electrical and magnetic ceramics. Materials Chemistry and Physics ［J ］. 1994（38）：305-324.

［6］刘红日. BiFeO 3薄膜的溶胶-凝胶制备及其铁电和介电性质

［J ］. 武汉理工大学学报，2007，29（7）：66-69.

［7］郭冬云，李美亚，刘军，等. Sol-gel 法制备Bi 3.4Ce 0.6Ti 3O 12铁

电薄膜及其性能［J ］. 中国科学E 辑：技术科学，2008，38（3）：442-447.

［8］付承菊，黄志雄，李杰，等. Sol-Gel 法制备Bi 3. 15Nd 0. 85Ti 3O 12

铁电薄膜［J ］. 压电与声光，2010，32（2）：274-276. ［9］张云峰，王华，任明放. Sol-gel 法制备Bi 3.25La 0.75Ti 2.94Nb 0.06O 12

铁电薄膜及其性能研究［J ］. 电工材料，2008（2）：30-34. ［10］郭冬云，毛薇，秦岩，等. Sol -gel 法制备Pb （Zr 0. 53T i 0. 47）

。

（4）一般溶胶－凝胶法所选用的液体源都是纯有机的，含有一定的毒性，对环境造成了危害，而且在溶胶制备过程中往往需要进行回流，使实验周期延长

［15］

。

（5）Sol-Gel 制备无机铁电薄膜的重要挑战之一来自薄膜的连续性和致密性。在实验中经常发现，有机溶胶与基体的湿润不匹配性会导致薄膜的不连续，有机前驱体在热处理过程的收缩易形成薄膜开裂，有机材料在晶化过程中的挥发易造成薄膜的多孔性。在Sol-Gel 或其它化学溶液沉积薄膜工艺中，常常对溶液制备工艺的变化和薄膜结构、性能的关系缺乏基本的认识。对于影响水解、聚合过程中结构演化因素及结晶生长等问题仍需要深入研究。

参考文献：

［1］H.N.Al-Shareef ，O.Auciell ，A.I.Kingon. Electrical properties of

O 3铁电薄膜［J ］. 材料导报，2010，24（11）：16-19，28. ［11］侯芳，臧涛成，李建康. 溶胶-凝胶法制备（Nd ，Bi ）

4

Ti 3

O 12铁电薄膜［J ］. 桂林理工大学学报，2010，30（1）：107-110.

［12］周卫东，孙慧，陈小兵. 溶胶-凝胶法制备SrBi 4-xLaxTi 4O 15

铁电薄膜及其性能研究［J ］. 电子显微学报，2006（增刊）：

97-98.

［13］王秀章，戴志高，刘美风，等. 溶胶-凝胶法制备掺钕钛酸

铋铁电薄膜及其性能［J ］. 湖北师范学院学报：自然科学版，2009，29（2）：6-9.

［14］周益春，唐明华. 铁电薄膜及铁电存储器的研究进展［J ］.

材料导报，2009，23（5）：1-17.

［15］向飞，刘颖，朱时珍，等. 水基前驱体法制备BST 铁电薄膜

的研究［J ］. 电子元件与材料，2005，24（5）：61-64. 第一作者简介：向

飞，女，1978年生，重庆人，硕士，工程

ferroelectric thin film capacitors with hybrid （Pt ，RuO2）elec -trodes for nonvolatile memory applications ［J ］. J.Appl.Phys. ，1995，77（5）：2146-2154.

［2］S.K.De ，R.Zuleeg. Integrated sol-gel PZT thin films on Pt ，Si

and GaAs for non -volatile memory applications ［J ］. Ferro -electrics ，1990，108，Part V ：37-46.

［3］肖定全. 当前铁电学研究的一些问题［J ］. 材料导报，1996

（1）：75-76.

［4］符春林，杨传仁，陈宏伟，等. 钛酸锶钡（BST ）薄膜的制备

师。研究领域：功能材料。已发表论文3篇。

(编辑：王智圣)

!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!

（上接第28页）

择高移动速度，而小车数量为2台时宜采用低移动速度，从而能够保证装配线的任意工站不会发生缺料而等待的现象。再多的小车数量及0.2m/s以上的高移动速度均属于浪费。

参考文献：［1］B. Rekiek ，

Pierre De Lit ，and A. Delchambre. Designing

mixed-product assembly lines ［J ］. IEEE Transactions and Au -tomation ，2000，16（3）：268-280.

［2］宋华明，马士华. 混合装配流水线上最小makespan 的协同优

化［J ］. 系统工程理论与实践，2007（2）：153-160. ［3］曹振新，朱云龙. 混流汽车总装配线上物料配送的研究与实

践［J ］. 计算机集成制造系统，2006，12（2）：285-291. ［4］刘纪岸，周康渠. 某摩托车企业发动机装配线物料配送仿真

与优化［J ］. 重庆工学院学报（自然科学），（12）：7-11.

［5］尚文利，史海波. 基于RFID 的混流装配汽车生产线物料动态

配送研究［J ］. 机械设计与制造，2007（2）：157-159. 作者简介：周金平，男，1967年生，湖南邵阳人，硕士，讲师。研究领域：基础工业工程、设施规划、系统仿真等。

5结束语

高效通畅的物料配送是实现混流装配线平衡和排序问题协同的基础。本文在分析一般MTO 企业混流装配线的基础上，假设不同类型产品的装配序列已经确定的情况下，建立了基于Plant Simulation 的准时制JIT 生产方式下的物流配送系统仿真模型及配送系统对Makespan 影响的数学模型，同时建立了搬运小车的调度策略。通过仿真试验设计的方法，优化配送系统中的搬运小车的数量及速度、装载量大小及线边暂存区最大最小库存量。现模型对于装配线工站数量的增减为人工调整，后续研究应解决通用模型的参数化设计问题与仿真模型的预热问题。

2009，23

(编辑：吴智恒)

Abstracts

Abstract: This paper discusses the energy-saving technology for rail vehicle air-conditioning systems from the aspect of refrigeration compressor selection and control, introduces several options for rail vehicle air conditioning energy saving, and makes a comparative analysis on the features of several energy-saving programs in rail vehicles application.

Key words: rail vehicle; air conditioning; energy saving; compressor; unloading; parallel connection; frequency conversion; digital scrollJoint-Stock Co., Ltd, Guangzhou510285, China)

Abstract: Dummy chest deflection is one of important targets in CNCAP. Adjusting the area that inflated airbag contacts dummy chest by way of changing steering column angle, can get the good conclusions that appropriate steering column angle can reduce dummy chest deflection and that analysis results can help design airbag.

Key words: steering column; Dummy; Chest deflection; Airbag

11-08-86 Design and Simulation of Parallel Linear Voltage-Stabilized Source Based on Multisim

Electrical Engineering Department, Shaoguan 512126, China)

11-08-69 Study on Energy Stability of Exposure

Limited, Dongguan523039, China)

XU Yun-wu, ZHOU Ze-xiang (Guangdong Songshan Polytechnic College

ZHONG Guan-qi, HU Ping, ZHENG Bin (Dongguan Shengyi Electronics

Abstract: This paper analyzes the PCB industry exposure machine downtime problems, presents that can through monitoring illumination method, monitoring exposure machine energy output, to achieve stable operation of exposure machine.

Key words: exposure; exposure lights; energy stability; intensity

11-08-71 The Analysis and Diagnosis of High Frequency Vibration Fault of Crank Press Based on Fault Tree

LIU Guang-hao, WEI Lin, QIN Ri-qiang (Liuzhou V ocational and Technical College, Liuzhou545006, China)

Abstract: High-frequency vibration fault of a certain type of crank press was succeed to be diagnosed and processed by using fault tree analysis, and meanwhile a case has been provided has provided a case for the fault tree analytic method in the equipment failure diagnosis aspect's application.

Key words: fault tree analysis; important degree; crank press; high-frequency vibration

Abstract: This paper discusses the process of designing a parallel linear regulated power supply, and simulates its output voltage and load capacity with multisim software. The simulation result is that its output voltage (15.785V) conforms to the theoretical design (15V).When the load resistor (R6) is taken 325Ω, 775Ω, 555Ω, 1,000Ω, the output voltages is 17.348V. The simulation result reveals that the parallel linear regulated power supply has the advantage of "low-power resistance". Compared with the series regulator, the parallel linear regulated power supply can more efficiently improve the sound quality of the audio power amplifier when it is put into the practice. Through the simulation result and practical use, it comes conclusion that the parallel linear power supply can be applied in the high-fidelity audio power amplifier and can improve its sound quality.Key words: parallel linear regulated power supply; Multisim; simulation; power amplifier

11-08-88 The Design of P lacing G asket Mechanism Based on the Functional Analysis

HE Jia-bing, YANG Zhen-yu, JIANG Wu-ji (Mechanical Department, Zhongshan Polytechnic, Zhongshan528404, China)

11-08-73 Three Phases Excitation Rectifier Transformers of Hydroelectric Generator

CAO Yan-peng (Guangzhou Junfa Electric Co., Ltd, Guangzhou511400, China)

Abstract: This paper elaborates the characteristics, technical requirement and main technical problems in designing and manufacturing for the three phases excitation rectifier transformers of hydroelectric generator. Through testing the harmonic of excitation transformers, numerate the impact of excitation transformers by high order harmonic. To supply the foundation of high order harmonic when designing excitation transformers.

Key words: excitation rectifier transformer; design; manufacture; technology

Abstract: This paper describes mechanical design methods and steps based on functional analysis, mechanical design of mechanical products should be started from functional analysis of mechanical product, mechanism scheme obtained through functional description and decomposition of product, function solving, functional evaluation and optimization. Taking design of placing gasket mechanism as an example, the paper discusses mechanical design process of placing gasket mechanism of Lithium battery bushing machine based on functional analysis.

Key words: functional analysis; functional decomposition; function solving; placing gasket mechanism

11-08-90 A discussion on Tabu Search Parameters Setting

Normal University, Guangzhou510540, China)

XU Hao (Industrial Center, TianHe College of Guangdong Polytechnic

11-08-75 Communication Subsystem of the Wind Source Based on CANopen

LI Fei, LIU Fang, ZHOU Yi (School of Mechanical Engineering Southwest Jiaotong University, Chengdu 610031, China)

Abstract: Because the low-speed maglev trains have wide application prospect, the article on low-speed maglev trains were introduced, and for low-speed maglev train made the communication requirements of CAN bus. This paper gave a comprehensive description about technical features of CAN bus, and introduced the CAN protocol CANopen. Through the analysis of the CANopen protocol according to the characteristics of the train, which indicate that agreement on the application of low-speed maglev train advantage. Finally, low-speed magnetic levitation vehicle air supply subsystem of compressed air system is an example of the train communication based on CANopen protocol.

Key words: CAN bus; CANopen protocol; air source subsystem

Abstract: Tabu search algorithm is the combinatorial optimization algorithm that provides a simple algorithm for solving complex problems. Searching for the best results so far with normal search algorithm could take very long time, and even possible Searching for bad results. Despite combinatorial optimization algorithm can find very good results in a shorter time, and if choosing unsuitable parameters and optimization might result into longer program runs or bad optimization results. In this paper we use Tabu search algorithm in a sample TSP. We implement and run the algorithm using different parameter selection and compare results. The parameter selection is performed to find the best parameters setting for the Tabu search algorithm.

Key words: Tabu search algorithm; traveling salesman problem; parameter selection

11-08-79 Experimental Determination and Numerical Simulation of the Radial Thermal Conductivity of Coils

LIN Zhi-yin, CHEN Xin-zhou(Sunten Electric Equipment Co., Ltd,Fashan 528300, China)

11-08-93 The Design of Portable Puncher Using Electrical Discharge Machining

LIN Qi-ming (Shantou Instrument Transfomer Factory, Shantou 515021, China)

Abstract: Researching of thermal conductivity of the coils has an important role in guiding the process for the coil casting and curing. Based on the basic principles of steady-state heat transfer method, an experimental device was set up to determine and calculate the radial thermal conductivity of simulated coils, and to obtain the thermal conductivity of the coil without wires (which is 0.3 W/m·K). And the correctness of this method was verified by numerical simulation.

Key words: thermal conductivity; experimental determination; numerical simulation

Abstract: This article provides an overview of EDM(Electrical Discharge Machining), along with an in-depth presentation from Mechanism, RC discharge circuit, stepper motor driver and impulse counter of using EDM to puncher. And provides a flow chart of Microprocessor's program.

Key words: Puncher using EDM; mechanism design; circuit design; new application

11-08-96 Latest Progress on Preparation of Ferroelectric Films by Sol-Gel Method

XIANG Fei (Guangdong Mechanical Research Institute, Guangzhou510635, China)

11-08-83 Influence of Steering Column Angle to Dummy Chest Deflection 122

YUAN Zhong-rong, WANG Yu-chao, YANG rong-shan(1. Guangzhou Automobile Industry Group Co., Ltd,Guangzhou 510640 ; 2. Institute of Automotive Engineering, Guangzhou Automobile Industry Group CO. , LTD, Guangzhou 510640)

Abstract: Sol-Gel method is an important method for preparation of ferroelectric thin films. Not only the principle, technology and peculiarities, but also ferroelectric properties of some materials prepared by Sol-Gel were reviewed. In the end, it is pointed out that the process of Sol-Gel should still be optimized and developed and the quality of ferroelectric thin films needed to be improved urgently, so as to adapt the requirement of devices.

Abstracts

Key words: Sol-Gel; ferroelectric thin film; application

11-08-99 Design and Calculation of Circular Plate Magnetorheological Fluid Clutch

050003,China;2. Staff Room of anti-aircraft artillery, Ordnance Engineering College, Shijiazhuang 050003, China; 3.Chongqing ChangAn Industry(Group)Co., Ltd., Chongqing 401120, China)

CUI Li-hui 1, XUE De-qing 2, LIU Chang-jiang 3, PENG Shi-zhong 1(1.College of Graduate,Ordnance Engineering College, Shijiazhuang

CHEN Yun-sheng (Guangzhou Huali Science and Technology V ocational College, Guangzhou511325, China)

11-08-120 Special Fixture of Milling Machine in Three Displacement Printing Machine Lever Element

Abstract: This paper introduces design methods and specific methods of operation of the special fixture of milling machine in three displacement printing machine lever element, the fixture can accurately and quickly clamping the three displacement printer lever parts, complete the leverage level surface processing. It improves production efficiency, shorts the processing time, reduces labor intensity and cost.

Key words: three displacement printer lever; step-faceting; special fixtures; milling

Abstract: The paper introduces the basic structure of circular plate magnetorheological fluid clutch and analyzes the material selection, the magnetic circuit, the best workspace of magnetorheological fluid, the winding diameter, the winding number and the power consumption related with the design of circular plate magnetorheological fluid clutch. The paper provides a set of design and calculation system.Key words: Magnetorheological Fiuid; clutch; design

11-08-123 Processing Methods of High Precision Profiled Crankshaft

China)

JI Jian-ping (Qinchuan Machinery Development Co., Ltd, Baoji 721009,

11-08-103 Acceleration Analysis of Giant Swaying Hammer

Amusement Equipment Co.,Ltd, Zhongshan528402,China)

CHEN Zhao-yang, WANG Yue-yong, LI Bing-jian (Golden Horse

Abstract: This paper simplifies the main movement of giant swaying hammer into a simple pendulum with huge amplitude, and solves the model numerically. According to acceleration composition theorem, the main and the second main movement of the giant swaying hammer are combined, and the passenger's absolute acceleration relative to fixed coordinate system is obtained. Then with coordinate transformation, an acceleration expression relative to body coordinate system is presented. Finally, a figuring example is given to prove that the method introduced in the paper is valid.

Key words: giant swaying hammer; simple pendulum; body coordinate system; acceleration

Abstract: In this paper, according to the characteristics of high-precision profiled crankshaft, a set of reasonable, simple and economical processing method is put forward. First, using a special technique and equipment for turning in the roughing and semi finishing on the lathe, turning parts of the geometric tolerance after it is 0.1mm or less, then using the whole sleeve knife row turning on coordinate boring machine in precision turning the accuracy of the finished turning can be achieved after the design drawings. The whole process of scientific and accurate process route is based on a reasonable selection of installation and calibration of reference is the key benchmark.

Key words: crankshaft; technology; accuracy; turning

11-08-126 Simple Method for Z3040 Drilling in Processing a Farmhand Heavily Pieces Hole

China)

11-08-106 Research on Smooth Tool Path for Five-Axis NC Machining Based on Fragmentary Method of Complex Curved Surface

ZHOU Yu (Dazhou Professional and Technical College, Dazhou635001,

LIU Fei-peng, ZHOU Shi-wei, LIU Xiong-wei, FENG Gao-jie (Guangdong University of Technology, Guangzhou510006, China)

Abstract: Fragmentation method is applied to Subdivide complex curved surface with the same or similar characteristics of the surface pieces, the tool path planning generation on iso-scallop is established in various surface pieces domain by torus end-mill ,tool-pose changes along with the curvature of machining surface .According to this method, smooth integration is completed between the surface pieces, which leads to the improvement of machining quality as well as the prevention of interference between work piece and too1.

Key words: surface fragmentation; tool pose; smooth; tool path

Abstract: When manufacturing the female connection holes (or hole series) on the flange of hydraulic cylinder jack, the general radial drilling machine is often used. Due to its restriction by the biggest vertical distance, it is very difficult to manufacture the female connection holes (or hole series) on the head faces of those longer work pieces. A simple method is put forward in this paper to manufacture holes with Z3040 radial drilling machine and save the costs of purchasing those large machines, which possesses higher practical value.Key words: radial drilling; dig hole; processing

LIU Duan-pin(Guangzhou Huadu District Vocational School of Science and Technology, Guangzhou 510850,China)

11-08-110 Study on Programming and Process Non-Circular Surface Thread on CNC

Abstract: Based on the elliptic surface thread programming and processing as an example, this paper discusses non-circular curved surface of screw thread workpiece programming method. Through the simulation software and FANUC system of NC machine tool processing, validation and analysis of the feasibility of the program. To solve the special curve and curved surface of thread machining production problems.

Key words: great procedure; variable; Non-circle curve outline; oval thread

HUANG Kan-feng, ZHANG Ming-rong (Guangzhou College of South China University of Technology, Guangzhou510800, China)

11-08-128 Study on Auto Parts Remanufacturing Technology Based on Worn Surface Repairing

Abstract: This paper introduces the auto parts remanufacturing research status at home and abroad, the surface repairing technology apply in the remanufacture of auto parts, and analyzing variety of properties for the worn surface repair coating, that could improve the re-manufactured parts the quality and performance.

Key words: auto parts; remanufacturing; surface repairing; nanocomposite electro-brush plating

11-08-130 Application of Electronic Protection in the Material Hoist

China)

ZHANG Wen-qian (Wuhua Second Constrution Co.,Ltd. Meizhou514000,

WANG Xiang-yang (Zhongshan Vacational Technical Middle School, Zhongshan528403, China)

11-08-114 Centrifuge Turntable Efficient Processing Method Discussion

Abstract:According to the performance characteristics and technical requirements of the blood test intelligent centrifuge, on the centrifuge micro gel cassette and tube rotary processing, using an effective process parameter and method, the processing effect completely meet the technical requirements.

Key words: centrifuge turntable; high performance parameters; NC machining

Abstract: This paper elaborates the Tic-Tac-frame material hoist electrical protection reasons, discusses the reasons of mechanism of thermal relay replaced, and introduces the theory and composition of electronic circuit protection.

Key words: traction motor; phase; short circuit; overload; electronic protection

LAN Min-hua (Liuzhou Mechanical and Electrical Engineering School of Guangxi, Liuzhou 545003, China)

11-08-133 Application of Controlling Technology on the Empty Bottle Inspection

Abstract : Empty Bottle Inspection Machine is mainly used in inspecting defects spoils and residual liquor in the recycle drinking bottles. On the modern and high speed drinking production line, Empty Bottle Inspection Machine is one of the high technological equipment. It is comprehensive high technological equipment that is a body of the spotlight, mechanical and electrical, the sensing technology, the imagery processing and the recognition. This paper introduces the working philosophy of empty bottle inspection machine and the application of its control technology

ZHANG Wei-feng (Changzhou Liuguojun Vocational Technology College,Changzhou213035,China)

Abstract: This paper analyzes the characteristics of the threaded parts, presents the NC machining process plan to solve the problem of clamping deformation and threaded deformed of the thread sleeve parts.

Key words: thin-walled parts; clamping distortion; thread chasers; endo cutter

11-08-118 CNC Machining Process of Thin Thread